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Answer the following problems.

problem 1)a) describe the effect of photoresist on the resolution of optical microscope?

problem 2) describe two practical imaging techniques.

problem 3) State four micro actuation mechanisms. How piezo materials and their mechanisms are used to effect micro actuations.

problem 4) prepare brief notes on the following:

i) Tuner

ii) resonator.

problem 5) What is frequency dependency of Q factor of an inductor in Radio Frequency range.

problem 6) List the fabrication steps of MEMS planar inductor.

problem 7) List out various fluid actuation mechanisms. prepare brief note on:

i) Dielectrophoresis.

ii) Electrowetting.

problem 8) describe the principle of Biochemical sensors.

Electrical & Electronics, Engineering

  • Category:- Electrical & Electronics
  • Reference No.:- M96320

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