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Question: Use a lumped-parameter model for the mechanical microsystem of Figure, where the serpentine springs are identical; they are illustrated in Figure with l = 20 nm and a square cross-section of 300 nm per side. The material Young's modulus is 170 Gpa. The masses of the shuttles are m1 = 200 ng and m2 = 280 ng. Determine all the magnitudes and phase angles corresponding to a sinusoidal force applied on m1 in the motion direction. Consider an overall damping coefficient c = 0.05 applying to both shuttle masses' motions.

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