Question: The shuttle mass m = 1.4 # 10-12 kg of Figure is supported by two identical beam springs, each of stiffness k1 = 2 N/m. Two identical longitudinal pairs create a capacitive force on the shuttle mass in the y direction, which is 1.4 times larger than the force required to close the gap d = 6 nm between the mass and a mobile, massless plate supported by a serpentine spring of stiffness k2 = 3 N/m. The superposition width of the capacitor plates is w = 250 nm, the constant capacitive gap is g = 5 nm, the electric permittivity is f = 8.8 # 10-12 F/m, and the viscous damping coefficient between the mass and substrate is c = 0.001 N-s/m. Determine and plot the mass displacement before and after contact with the mobile stop plate assuming that the capacitive actuation is discontinued after contact.
