Ask Question, Ask an Expert

+1-415-315-9853

info@mywordsolution.com

Ask Physics Expert

problem 1)a) describe how the chemical vapor deposition techniques are utilized to deposit thin films of various materials in MEMS. Compare these techniques with those of PVD.

b) Determine desired viscosity to density ratio of a photoresist solution to be prepared for the spin coating technique. The allowed time of rotation of chunk within production process is 2 minutes and desired height of photoresist is 50 μm. The rotor rotates at a speed of 10, 000 rpm. Assume original height is 500 μm.

c) describe a process to produce variable resistivity (through depth) semiconductors.

problem 2)a) Determine size of the mask opening that after anisotropic etching will yield a flat rectangular area which results in a volume of 100 X 200 X80 μm3.

b) describe photolithography process steps to fabricate micro feature of SiO2 on Si using positive as well as negative photoresist.

c) describe LIGA process to fabricate MEMS structures.

problem 3)a) What are the effects of diffraction phenomenon on designing of high resolution optical microscope?

b) The optical system has numerical aperture (NA) of 0.3 and operates with light of wavelength of 0.365 μm. The resist in use requires an MTF of 0.5 or greater for adequate pattern reproduction. Process needs a focus tolerance of ±2 μm.

i) find out the resolution, assuming incoherent illumination

ii) What will be the change in resolution if NA is increased to 0.42.

Physics, Academics

  • Category:- Physics
  • Reference No.:- M96319

Have any Question? 


Related Questions in Physics

It has been generally known to si technologists such as the

It has been generally known to Si technologists (such as the CCD or Charge Coupled Device and high efficiency solar cell engineers) that iron impurity is a rather nuisance recombination center because it is highly unstab ...

Describe the greenhouse effect that is occurring in the

Describe the greenhouse effect that is occurring in the Earth's atmosphere.

If the fluid of density r in problem obeys the perfect gas

If the fluid of density r in Problem obeys the perfect gas law, obtain the equation of state of the mixture, that is, Will this result be valid if a liquid is present instead of a solid? Problem:- For a fluid of density ...

Investing 1000 at an annual interest rate of r compounded

Investing $1000 at an annual interest rate of r%, compounded continuously, for 10 years gives you a balance of $B, where B = g(r). Give a financial interpretation of the statements: (a) g(5) ≈ 1649. (b) g (5) ≈ 165. What ...

A person on a swing moves so that the chain is horizontal

A person on a swing moves so that the chain is horizontal at the turning points. Show that the centripetal acceleration of the person at the low point of the arc is exactly 2 g, regardless of the length of the chain. Thi ...

Suppose that a 920 kg car is traveling at 20 ms its brakes

Suppose that a 920 kg car is traveling at +20 m/s. Its brakes can apply 4596 N of force. What is the minimum distance required for the car to stop?

An innitely long wire carries a current i along the x-axis

An in?nitely long wire carries a current I along the x-axis, and is bent so as to have a semi-circular detour around the origin, with radius R. Determine B at the origin.

A child and sled with a combined mass of 527 kg slide down

A child and sled with a combined mass of 52.7 kg slide down a frictionless hill that is 10.9 m high at an angle of 29? from horizontal. The acceleration of gravity is 9.81 m/s2 . If the sled starts from rest, what is its ...

Describe the relationship between electron orbital energy

Describe the relationship between electron orbital energy levels and the energy of light that electrons emit for atoms in a gas.

Algebraic physics question older railroad tracks in the usa

Algebraic Physics Question: Older railroad tracks in the USA are made of 12 meter long pieces of steel. When the tracks are laid, gaps are left between the sections to prevent buckling when the steel thermally expands. I ...

  • 4,153,160 Questions Asked
  • 13,132 Experts
  • 2,558,936 Questions Answered

Ask Experts for help!!

Looking for Assignment Help?

Start excelling in your Courses, Get help with Assignment

Write us your full requirement for evaluation and you will receive response within 20 minutes turnaround time.

Ask Now Help with Problems, Get a Best Answer

Section onea in an atwood machine suppose two objects of

SECTION ONE (a) In an Atwood Machine, suppose two objects of unequal mass are hung vertically over a frictionless

Part 1you work in hr for a company that operates a factory

Part 1: You work in HR for a company that operates a factory manufacturing fiberglass. There are several hundred empl

Details on advanced accounting paperthis paper is intended

DETAILS ON ADVANCED ACCOUNTING PAPER This paper is intended for students to apply the theoretical knowledge around ac

Create a provider database and related reports and queries

Create a provider database and related reports and queries to capture contact information for potential PC component pro

Describe what you learned about the impact of economic

Describe what you learned about the impact of economic, social, and demographic trends affecting the US labor environmen