Ask Question, Ask an Expert

+1-415-315-9853

info@mywordsolution.com

Ask Physics Expert

problem 1)a) describe how the chemical vapor deposition techniques are utilized to deposit thin films of various materials in MEMS. Compare these techniques with those of PVD.

b) Determine desired viscosity to density ratio of a photoresist solution to be prepared for the spin coating technique. The allowed time of rotation of chunk within production process is 2 minutes and desired height of photoresist is 50 μm. The rotor rotates at a speed of 10, 000 rpm. Assume original height is 500 μm.

c) describe a process to produce variable resistivity (through depth) semiconductors.

problem 2)a) Determine size of the mask opening that after anisotropic etching will yield a flat rectangular area which results in a volume of 100 X 200 X80 μm3.

b) describe photolithography process steps to fabricate micro feature of SiO2 on Si using positive as well as negative photoresist.

c) describe LIGA process to fabricate MEMS structures.

problem 3)a) What are the effects of diffraction phenomenon on designing of high resolution optical microscope?

b) The optical system has numerical aperture (NA) of 0.3 and operates with light of wavelength of 0.365 μm. The resist in use requires an MTF of 0.5 or greater for adequate pattern reproduction. Process needs a focus tolerance of ±2 μm.

i) find out the resolution, assuming incoherent illumination

ii) What will be the change in resolution if NA is increased to 0.42.

Physics, Academics

  • Category:- Physics
  • Reference No.:- M96319

Have any Question? 


Related Questions in Physics

A heavy string is tied at one end to a movable support and

A heavy string is tied at one end to a movable support and to a light thread at the other end as shown in figure (15-E12). The thread goes over a fixed pulley and supports a weight to produce a tension. The lowest freque ...

Write a two page paper double-spaced and in your own words

Write a two page paper, double-spaced and in your own words, describing why (or how) an FFT (Fast Fourier Transform) was used to "decode" the DTMF frequency code (pattern) used in telephones in the lab activity (performe ...

Is there any relationship between the probability

Is there any relationship between the probability distribution of the time taken for all trajectories to coalesce, and the equilibration time of a Markov chain? Prove that there is a relationship, or find a single chain ...

1 the two lowest-energy wave functions of the electron bund

1. The two lowest-energy wave functions of the electron bund to the two protons are symmetric and antisymmetric. Sketch and explain why one has a lower energy while the other has a higher energy. 2. An electron is inject ...

1 what makes event structure analysis a systematic method2

1.) What makes event structure analysis a systematic method? 2.) How and why did evaluation research develop? How does it differ from other types of social science research? 3.) What is the difference between stakeholder ...

Do the same as given problem but use simplorer another

Do the same as given problem, but use SIMPLORER (another circuit/system simulator). Problem:- Use the MATLAB/Simulink block diagram shown in given figure to simulate a vector control for a small hydropower plant of 100 k ...

An 1800 kg car stopped at a traffic light is struck from

An 1800 kg car stopped at a traffic light is struck from the real by a 900kg car. The two cars become entangled, moving along the same paths that of the originally moving car. If the smallest car were moving at 20m/s bef ...

A 283-m310000 ft3 basin is to be aerated with six spargers

A 283-m 3 (10,000 ft 3 ) basin is to be aerated with six spargers, each sparger using air at the rate of 7:08 × 10 -3  m 2 /s. If 283 K wastewater, initially containing a dissolved oxygen level of 5×10 -3  mmol/L and fil ...

A distortion is observed in the experimental hfcv curve of

A distortion is observed in the experimental HFCV curve of the 100A-oxide p-MOSC in problem after it is stressed in a very high electric field (about V G =8V). The distortion is indicated by the non-equal voltage shifts ...

1 if the above sample is n-type and the electron

1. If the above sample is n-type and the electron concentration at the location x 1  is N(x 1 )=10 16 cm -3 , what is the drift current density in A/cm 2 ? What is the concentration gradient at this point, dN(x 1 )/dx? 2 ...

  • 4,153,160 Questions Asked
  • 13,132 Experts
  • 2,558,936 Questions Answered

Ask Experts for help!!

Looking for Assignment Help?

Start excelling in your Courses, Get help with Assignment

Write us your full requirement for evaluation and you will receive response within 20 minutes turnaround time.

Ask Now Help with Problems, Get a Best Answer

Section onea in an atwood machine suppose two objects of

SECTION ONE (a) In an Atwood Machine, suppose two objects of unequal mass are hung vertically over a frictionless

Part 1you work in hr for a company that operates a factory

Part 1: You work in HR for a company that operates a factory manufacturing fiberglass. There are several hundred empl

Details on advanced accounting paperthis paper is intended

DETAILS ON ADVANCED ACCOUNTING PAPER This paper is intended for students to apply the theoretical knowledge around ac

Create a provider database and related reports and queries

Create a provider database and related reports and queries to capture contact information for potential PC component pro

Describe what you learned about the impact of economic

Describe what you learned about the impact of economic, social, and demographic trends affecting the US labor environmen