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Explain how asymmetric depositions can occur on a wafer in a sputter deposition system.

Asymmetric deposition means that thicker deposition occurs on one side of a feature (a step or side of a trench, for example) than the other.

Also suggest a way to decrease the asymmetry. Use schematic diagrams in your explanations.

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Chemistry, Academics

Category:- Chemistry
Reference No.:- M92603005

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