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Consider the low frequency Clf/Cox versus CG curve in figure 1. It is for a MOS capacitor with a p-type substrate (NA = NA1), a metal gate and VFB = 0. Draw the Cif/CCox versus VG curve for the device if the metal gate is replaced with a p-type poly-Si gate doped to NA = NA1. Explain your answer.

375_Characteristics of a MOS capacitor.png

Figure 1. lf CV characteristics of a MOS capacitor

The subthreshold ID-VG curves of a MOSFET are shown in Figure 2 before and after stressing the device. Determine the interface trap density change ΔDit (in cm-2eV-1) induced by the stress. T = 300K, εox = 3.9, tox = 10 nm.

1685_Characteristics of a MOS capacitor1.png

Figure 2. Transfer characteristics of a MOSFET before and after stress

You may find the following useful: ?Dit = Cox/2.3kT.(1/(slope before)-1/(slope after))

Why do the low frequency and high frequency CV curves differ in inversion?

Using the transfer characteristics shown in Figure 3 (VD = 2V; W/L = 10:1). Calculate the following:

The threshold voltage

The field effect mobility

1968_Transfer characteristics of a TFT.png

Figure 3. Transfer characteristics of a TFT

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