1 what is the wavelength regime of each of the lithographic, Ask an Expert

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1. What is the wavelength regime of each of the lithographic techniques listed in Problem 9? (red-visible light, green-visible light, blue light, UV (E=SeV), e-beam (acceleration voltage of 10 keV), and x-ray).

2. Compare wet and dry etching in terms of its directionality, selectivity, cleanliness, feature size, and controllability.

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