Question in the simox process during the thermal anneal, Ask an Expert

Economics

Question: In the SIMOX process, during the thermal anneal step, for forming the buried oxide with incorporating different oxygen doses, what are the differences? In a general SIMOX wafer, what behaviors may change the quality of the silicon thin-film and the buried oxide? How to improve them?

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Microeconomics, Economics

Category:- Microeconomics
Reference No.:- M92587745

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